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| MAIN FUNCTION & FEATURE |
| Frequency |
13.560MHz |
| Out power |
1000w |
| Reflect Power |
<3w |
| Max load current |
30ARMS |
| Max load voltage |
7000VRMS |
| Transmission efficiency |
>94% |
| Load impedance |
50Ω |
| RF Input connector |
50 Ω, UHF（or N-type）, female |
| Max plasma DC bias voltage |
0 to 2.000 VDC |
| DC bias value |
0~5VDC |
| Matching time |
3~5s |
| Main coil |
8 |
| Main capacitor |
Vacuum cap. |
| Matching impedance range of real part |
0~80Ω |
| Matching impedance range of imaginary part |
-j200~~+j100 |
| RF input connector |
50 Ω, UHF（or N-type）or customized |
| Port and cooling way |
| Control Port |
Auto/Manual ctrl window |
| Cooling method |
Forced cool air |
| Air velocity |
24CFM |
| Power supply |
| AC power supply |
220VAC |
| AC frequency |
50/60Hz |
| Power supply power factor |
90%(at peak power) |
| Mechanical Feature |
| Screw type |
6-32 |
| Weight |
5kg |
| Dimension |
430mm（D）x220mm（W）x130mm（H），or customized
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